Specifications
| Maximum Wafer Diameter | 4 inch |
|---|---|
| Speed adjustable range | 100 to 9999 rpm, adjustable |
| Acceleration range | 100 to 9999 rpm/s |
| Speed resolution | 1 rpm |
| Max single step time | 3000 s |
| Time resolution | 1 s |
| Programmable control | 5 programmable, 5steps |
| Motor | 75 W Brushless Motor |
| Vacuum plate (chuck) | O. D of 10 mm, 25 mm, 55 mm |
| Working voltage | AC220 V, 60 Hz |
| Dimension | 250×210×200 mm |
Features
Standard Accessories
| Name of Accessories | Quantity |
| Spin coater | 1 set |
| Vacuum pump | 1 set |
| Vacuum plate | 3 pieces |
Applications