Vacuum Spin Coater LVSC-A10 is a benchtop unit which can coat substrates of maximum size 4 inch. It has maximum speed of 9999 rpm and a 5 step spin controller option. Variable sizes of vacuum chuck, oil-less vacuum pump is included in the package. It is used in nanotechnology, electronics, semiconductor industry etc.
Catalog| Maximum Wafer Diameter | 4 inch |
|---|---|
| Speed adjustable range | 100 to 9999 rpm, adjustable |
| Acceleration range | 100 to 9999 rpm/s |
| Speed resolution | 1 rpm |
| Max single step time | 3000 s |
| Time resolution | 1 s |
| Programmable control | 5 programmable, 5steps |
| Motor | 75 W Brushless Motor |
| Vacuum plate (chuck) | O. D of 10 mm, 25 mm, 55 mm |
| Working voltage | AC220 V, 60 Hz |
| Dimension | 250×210×200 mm |
It is used to apply thin films on the substrates in organic research, semiconductor industry etc.
| Name of Accessories | Quantity |
| Spin coater | 1 set |
| Vacuum pump | 1 set |
| Vacuum plate | 3 pieces |
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